Технические параметры
Тип | Inline NO. CP-Series |
RF Power supply device | Maximum operation function 800W |
Cylinder control | Flow control |
Vacuum detection table | Flow（CFM） |
Vacuum operation mode | Frequency conversion / preset 50/60Hz |
Vacuum setting value | 150mTorr |
The cavity size | 438*429*60mm |
Op.Temperature | (40–60) ℃ |
Gas-pipe line | Substrate ： hollow electrode Lead Frame ：Solid motor |
Number of guide plate tracks | 3 or 4 |
Track size | Adjust according to the size of the workpiece |
Масса | Platform ：765kg Pump ：85kg |
Измерение | 2400*1380*1800mm |
Sweeter module | Press-in ：Pre-working temporary area to the cavity Push-off: Cavity to the rear workpiece storage area |
Диаграмма размера контура структуры
